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Patent Searching and Data


Title:
APPARATUS AND METHOD FOR CONTINUOUSLY MANUFACTURING SILICON NITRIDE
Document Type and Number:
WIPO Patent Application WO/2015/099333
Kind Code:
A1
Abstract:
The present invention relates to an apparatus and a method for continuously manufacturing silicon nitride, and more specifically, an apparatus and a method for continuously manufacturing silicon nitride capable of continuous manufacturing of silicon nitride are disclosed. The present invention provides the apparatus for continuously manufacturing silicon nitride, comprising: a synthesis device which receives chlorosilane (SiCl4) gas and ammonia (NH3) gas through separate nozzles and generates a product, silicon diimide (Si(NH)2), and a byproduct, chloroammonium (NH4Cl); a pyrolysis reactor for receiving a mixture of the product and the byproduct from the synthesis device, and performing pyrolysis of the byproduct by heating the mixture at a temperature of 100-1200°C, and pyrolysis of the product into amorphous silicon nitride (Si3N4) and ammonia, thereby manufacturing the amorphous silicon nitride; and a crystallization reactor for heating the amorphous silicon nitride manufactured in the pyrolysis reactor at a temperature of 1200-1700°C to crystallize same into crystal silicon nitride (Si3N4).

Inventors:
CHUNG YONG-KWON (KR)
KOO JAE-HONG (KR)
KIM SHIN-A (KR)
CHI EUN-OK (KR)
HAN JEE-HYUN (KR)
Application Number:
PCT/KR2014/012225
Publication Date:
July 02, 2015
Filing Date:
December 11, 2014
Export Citation:
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Assignee:
OCI CO LTD (KR)
International Classes:
B01J19/26; B01J12/00; C01B21/082
Foreign References:
US4122155A1978-10-24
KR20110112334A2011-10-12
KR20120088455A2012-08-08
US4929432A1990-05-29
Other References:
ZIEGENBALG, G. ET AL.: "Gas-phase synthesis of amorphous silicon nitride-reaction paths and powder characteristics.", JOURNAL OF MATERIALS SCIENCE, vol. 34, no. 9, 1999, pages 2199 - 2206
MAZDIYASNI, K. S. ET AL.: "Synthesis, Characterization, and Consolidation of Si3N4 Obtained from Ammonolysis of SiC14", JOURNAL OF THE AMERICAN CERAMIC SOCIETY, vol. 56, no. 12, 1973, pages 628 - 633
Attorney, Agent or Firm:
DAE-A INTELLECTUAL PROPERTY CONSULTING (KR)
특허법인 대아 (KR)
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