APPARATUS AND METHOD FOR CONTROLLED CANTILEVER MOTION THROUGH TORSIONAL BEAMS AND A COUNTERWEIGHT

Title:

APPARATUS AND METHOD FOR CONTROLLED CANTILEVER MOTION THROUGH TORSIONAL BEAMS AND A COUNTERWEIGHT

Document Type and Number:

WIPO Patent Application WO2001087766

Kind Code:

A3

Abstract:

An optical micro-electromechanical device (20) having a substrate (23) and a mirror assembly suspended above the substrate. The mirror assembly includes a torsional beam (24) and a cantilever (26). The cantilever includes a first end (28) attached to the torsional beam and a second end (30) for supporting a mirror head (32). A connector (34) is attached to the torsional beam and a counterweight (36) is attached to the connector.

Inventors:

CHASE STEVEN M
CHANG-HASNAIN CONNIE J
WAITE JEFFREY MICHAEL

Application Number:

PCT/US2001/015545

Publication Date:

March 14, 2002

Filing Date:

May 15, 2001

Export Citation:

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Assignee:

UNIV CALIFORNIA (US)

International Classes:

B81B3/00; (IPC1-7): G02B5/08; G02B7/182

Foreign References:

US5115351A	1992-05-19
US5115354A	1992-05-19
US5535047A	1996-07-09
US5760947A	1998-06-02

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