Title:
APPARATUS AND METHOD FOR CONTROLLING HEATING LAMP OF RAPID HEAT TREATMENT EQUIPMENT
Document Type and Number:
WIPO Patent Application WO/2010/064813
Kind Code:
A3
Abstract:
The method of the present invention for controlling a heating lamp of rapid heat treatment equipment comprises: a step wherein a heating lamp group is divided into a plurality of subgroups to determine graphical data regarding input voltage versus the reference input current that is applied to the subgroups uniformly; a step wherein actual input current respectively applied to each group is measured to obtain graphical data regarding input voltage versus actual input current; a step wherein a difference value for calibration of each subgroup is obtained from the difference between the reference input current and the actual input current; and a step wherein the difference value for calibration is reflected to apply a voltage to said subgroup individually. According to the prevent invention, substrate heating takes place uniformly because differences of calibration are reflected in actual input current to apply a voltage to a subgroup.
Inventors:
JI SANG HYUN (KR)
LEE DAE YONG (KR)
LEE SEUNG-HWAN (KR)
LEE DAE YONG (KR)
LEE SEUNG-HWAN (KR)
Application Number:
PCT/KR2009/007053
Publication Date:
October 21, 2010
Filing Date:
November 27, 2009
Export Citation:
Assignee:
AP SYSTEMS INC (KR)
JI SANG HYUN (KR)
LEE DAE YONG (KR)
LEE SEUNG-HWAN (KR)
JI SANG HYUN (KR)
LEE DAE YONG (KR)
LEE SEUNG-HWAN (KR)
International Classes:
H05B1/02
Foreign References:
| JP2001110737A | 2001-04-20 | |||
| JP2005123286A | 2005-05-12 | |||
| JPH11195614A | 1999-07-21 | |||
| KR100395662B1 | 2003-08-25 |
Attorney, Agent or Firm:
HUH, Jin-Seok (832-3Yeoksam-dong, Gangnam-gu, Seoul 135-080, KR)
Download PDF: