Title:
APPARATUS AND METHOD FOR DETECTING ELECTROMAGNETIC RADIATION USING ELECTRON PHOTOEMISSION IN A MICROMECHANICAL SENSOR
Document Type and Number:
WIPO Patent Application WO2001020346
Kind Code:
A3
Abstract:
A micromechanical sensor and method for detecting electromagnetic radiation involve producing photoelectrons from a metal surface in contact with a semiconductor. The photoelectrons are extracted into the semiconductor, which causes photo-induced bending. The resulting bending is measured, and a signal corresponding to the measured bending is generated and processed. A plurality of individual micromechanical sensors can be arranged in a two-dimensional matrix for imaging applications.
Inventors:
DATSKOS PANAGIOTIS G
RAJIC SLOBODAN
DATSKOU IRENE
EGERT CHARLES M DI
RAJIC SLOBODAN
DATSKOU IRENE
EGERT CHARLES M DI
Application Number:
PCT/US2000/025406
Publication Date:
November 22, 2001
Filing Date:
September 15, 2000
Export Citation:
Assignee:
UT BATTELLE LLC (US)
International Classes:
G01J5/40; H04N5/33; (IPC1-7): G01J1/00; G01J5/00; G01J5/10
Domestic Patent References:
| WO1997026556A1 | 1997-07-24 |
Other References:
DATSKOS P G ET AL: "PHOTOINDUCED AND THERMAL STRESS IN SILICON MICROCANTILEVERS", APPLIED PHYSICS LETTERS,US,AMERICAN INSTITUTE OF PHYSICS. NEW YORK, vol. 73, no. 16, 19 October 1998 (1998-10-19), pages 2319 - 2321, XP000788529, ISSN: 0003-6951
DATABASE INSPEC [online] THE INSTITUTION OF ELECTRICAL ENGINEERS, STEVENAGE, GB; 1 June 1999 (1999-06-01), P.DATSKOS ET AL: "Detection of infrared photons using the electronic stress in metal-semiconductor cantilever interfaces", XP002166817, Database accession no. 6542761
DATABASE INSPEC [online] THE INSTITUTION OF ELECTRICAL ENGINEERS, STEVENAGE, GB; 1 June 1999 (1999-06-01), P.DATSKOS ET AL: "Detection of infrared photons using the electronic stress in metal-semiconductor cantilever interfaces", XP002166817, Database accession no. 6542761
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