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Title:
APPARATUS AND METHOD OF DETECTING PROBE TIP CONTACT WITH A SURFACE
Document Type and Number:
WIPO Patent Application WO2006050494
Kind Code:
A3
Abstract:
We disclose an apparatus and method for detecting probe-tip (120) contact with a surface, generally inside a focused ion-beam instrument, where the probe tip (120) is attached to a capsule (130), and the capsule (130) is movably secured in a probe shaft (140). There is a fiber-optic cable (150) having a first end and a second end; a beam splitter (115) having first and second output ports; and a light source (100) connected to the beam splitter (115). The first output port of the beam splitter (115) is connected to the first end of the fiber-optic cable (150), and the second output port of the beam splitter (115) is connected to a photodiode (110). The second end of the fiber-optic cable (150) has a mirror (155) for reflecting incident light at approximately a ninety-degree angle to the axis of the optical path in the fiber-optic cable (150) and onto the capsule (130), so that the intensity of the light reflected back from the capsule (130) through the fiber-optic cable (150) is proportional to the deflection of the capsule (130) as the probe tip (120) makes contact with the surface.

Inventors:
MOORE THOMAS M (US)
ZAYKOVA-FELDMAN LYUDMILA (US)
Application Number:
US2005039940W
Publication Date:
December 14, 2006
Filing Date:
November 03, 2005
Export Citation:
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Assignee:
OMNIPROBE, INC.
MOORE, THOMAS, M.
ZAYKOVA-FELDMAN, LYUDMILA
International Classes:
G01J1/04; H01J3/14
Foreign References:
US5479024A1995-12-26
US5324935A1994-06-28
US6713743B22004-03-30
US20040061872A12004-04-01
Other References:
See also references of EP 1817557A2
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