Title:
APPARATUS AND METHOD FOR EXAMINING AND/OR PROCESSING A SAMPLE
Document Type and Number:
WIPO Patent Application WO/2019/243437
Kind Code:
A3
Abstract:
The present invention relates to an apparatus (2400, 2600) for examining and/or processing a sample (400, 2010), said apparatus comprising: (a) a scanning particle microscope (2410) for providing a beam of charged particles (840), which can be directed on a surface of the sample (400, 2010); and (b) a scanning probe microscope (2470) with a deflectable probe (200, 500, 800, 900, 1000, 1100, 1200, 1300, 1500, 1600, 1640, 1670, 2600); (c) wherein a detection structure (230, 530, 1030, 1130, 133, 30, 1630, 1690, 2630) is attached to the deflectable probe (200, 500, 800, 900, 1000, 100, 1200, 1300, 1500, 1600, 1640, 1670, 2600).
Inventors:
BAUR CHRISTOF (DE)
BUDACH MICHAEL (DE)
BUDACH MICHAEL (DE)
Application Number:
PCT/EP2019/066235
Publication Date:
February 06, 2020
Filing Date:
June 19, 2019
Export Citation:
Assignee:
ZEISS CARL SMT GMBH (DE)
International Classes:
H01J37/28; G01Q20/00; G01Q30/02
Foreign References:
| US20160202288A1 | 2016-07-14 | |||
| JP2984154B2 | 1999-11-29 | |||
| EP0596494A2 | 1994-05-11 | |||
| US6642517B1 | 2003-11-04 | |||
| US5394741A | 1995-03-07 | |||
| EP2023372A1 | 2009-02-11 | |||
| US5634230A | 1997-06-03 | |||
| US20150169997A1 | 2015-06-18 |
Attorney, Agent or Firm:
WEGNER, Hans et al. (DE)
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