Title:
APPARATUS AND METHOD FOR FORMING ALIGN MARK ON MASK FRAME, AND APPARATUS AND METHOD FOR MANUFACTURING MASK FRAME
Document Type and Number:
WIPO Patent Application WO/2022/080942
Kind Code:
A1
Abstract:
A device according to a disclosed embodiment is a device for forming an align mark on a mask frame, and comprises: a contact-type measurement instrument for measuring the state of alignment of a mask frame which has been completely processed; and an alignment device for realigning the mask frame on the basis of the alignment state; and a marking device for forming an align mark on the mask frame when the realignment is completed, wherein, when coupling the mask frame to a mask sheet or a mask stick in order to manufacture a mask assembly, the align mark is used for alignment between each other.
Inventors:
YU HONG WOO (KR)
Application Number:
PCT/KR2021/014348
Publication Date:
April 21, 2022
Filing Date:
October 15, 2021
Export Citation:
Assignee:
PIMS INC (KR)
International Classes:
B23K26/06; B23K26/03; B23K101/24
Foreign References:
| KR20110136436A | 2011-12-21 | |||
| JP2019094529A | 2019-06-20 | |||
| KR101579907B1 | 2015-12-23 | |||
| US20200209735A1 | 2020-07-02 | |||
| KR20090031825A | 2009-03-30 |
Attorney, Agent or Firm:
CHANG, Duck Soon et al. (KR)
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