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Title:
APPARATUS AND METHOD FOR INSPECTING A LIGHT TRANSMISSIVE OPTICAL COMPONENT
Document Type and Number:
WIPO Patent Application WO/2018/196034
Kind Code:
A1
Abstract:
An apparatus (10), system and method for inspecting a light transmissive optical component (5) are provided. The apparatus (10) comprises an image capturing module (20) arranged on a first side of a support (30) configured to hold a light transmissive optical component (5) whilst it is being inspected. One or more first illuminating means (40) are arranged on the first side of the support (30) and adapted to illuminate from a first side of a light transmissive optical component (5) held by said support (30). One or more second illuminating means (50) are arranged on a second side of the support (30) and adapted to illuminate from a second side of the light transmissive optical component (5) held by said support (30), the second side of the support (30) opposing the first side of said support (30). One or more third illuminating means (60) arranged on the second side of the support (30) and adapted to provide transmissive illumination at the second side of the light transmissive optical component (5) held by the support (30), the third illuminating means (60) comprises one or more of an illuminating surface (64) and a light blocking surface (62) selectively operable and are arranged to face and substantially align with the second illuminating means (50) on the second side of the support (30). The one or more first illuminating means (40), the one or more second illuminating means (50) and the one or more third illuminating means (60) are adapted to be selectively switched on to enable the image capturing module (20) to capture one or more bright field images and dark field images of the light transmissive optical component (5) held by the support (30).

Inventors:
NIKITIN, Vladislav (16F/7R, Kong, CN)
LIU, Ying (Flat C 22F Block 2 Ocean view Ma on shan, N.T. Hong Kong, Kong, CN)
WU, Changli (10E LiTing Ge, LiGang WanYeFeng R, Futian area ShengZhen, ShengZhen, CN)
Application Number:
CN2017/083450
Publication Date:
November 01, 2018
Filing Date:
May 08, 2017
Export Citation:
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Assignee:
HONG KONG APPLIED SCIENCE AND TECHNOLOGY RESEARCH INSTITUTE COMPANY LIMITED (5/F Photonics Centre, 2 Science Park East AvenueHong Kong Science Park, Shati, N.T. Hong Kong, Kong, CN)
International Classes:
G01M11/02; G01N21/958
Foreign References:
JP2009288121A2009-12-10
CN204758502U2015-11-11
CN106537110A2017-03-22
CN203688465U2014-07-02
CN103743761A2014-04-23
CN1090042A1994-07-27
Attorney, Agent or Firm:
CHINA TRUER IP (10A3, Jiangxi Shiji Haoting Building, Shennan Road South,Chegong Miao, Futian Distric, Shenzhen Guangdong 0, 518040, CN)
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