Title:
APPARATUS AND METHOD FOR JOINT MEASUREMENT OF FIELDS OF SCATTERED/REFLECTED OR TRANSMITTED ORTHOGONALLY POLARIZED BEAMS BY AN OBJECT IN INTERFEROMETRY
Document Type and Number:
WIPO Patent Application WO2004090465
Kind Code:
A3
Abstract:
A method of making interferometric measurements of an object, the method including: generating an input beam (124) that includes a plurality of component beams (126A, 126B), each of which is at a different frequency and all of which are spatially coextensive with each other, some of the components having a first polarization and the rest having a second polarization that is orthogonal to the first polarization; deriving a plurality of measurement beams (128C, 128D) from the plurality of component beams, each of the plurality of measurement beams being at the frequency of the component beam from which it is derived; focusing the plurality of measurement beams onto a selected spot (160) to produce a plurality of return measurement beams; combining each of the return measurement beams of the plurality of return measurement beams with a different corresponding reference beam of a plurality of reference beams to produce a plurality of interference beams; and acquiring a plurality of electrical interference signal values for the selected spot from the plurality of interference beams.
Inventors:
HILL HENRY ALLEN (US)
Application Number:
PCT/US2004/010031
Publication Date:
March 24, 2005
Filing Date:
April 01, 2004
Export Citation:
Assignee:
ZETETIC INST (US)
HILL HENRY ALLEN (US)
HILL HENRY ALLEN (US)
International Classes:
G01B9/02; G03F7/20; (IPC1-7): G01B9/02
Foreign References:
| US6753968B2 | 2004-06-22 | |||
| US6717736B1 | 2004-04-06 | |||
| US6552852B2 | 2003-04-22 | |||
| US5602643A | 1997-02-11 |
Other References:
See also references of EP 1608934A4
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