Title:
APPARATUS AND METHOD FOR MAKING FIDUCIALS ON A SUBSTRATE
Document Type and Number:
WIPO Patent Application WO/2010/077719
Kind Code:
A3
Abstract:
Fiducials having substantially continuous portions made on a substrate allow the position of the substrate to be determined. An approach for making fiducials involves moving first and second fiducial devices together back and forth across the substrate along a trajectory having a component along the lateral axis of the substrate while the substrate and the first and second fiducial devices are in relative motion along the longitudinal axis of the substrate. The first fiducial device operates to make one fiducial on the substrate during the movement along the trajectory and the relative motion. The second fiducial device operates to make another fiducial on the substrate during the movement along the trajectory and the relative motion. The fiducials may be formed so that they have a constant spatial frequency with the first fiducial being out of phase with respect to the second fiducial.
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Inventors:
CARLSON DANIEL H (US)
THEIS DANIEL J (US)
NELSON BRIAN K (US)
THEIS DANIEL J (US)
NELSON BRIAN K (US)
Application Number:
PCT/US2009/067273
Publication Date:
September 16, 2010
Filing Date:
December 09, 2009
Export Citation:
Assignee:
3M INNOVATIVE PROPERTIES CO (US)
CARLSON DANIEL H (US)
THEIS DANIEL J (US)
NELSON BRIAN K (US)
CARLSON DANIEL H (US)
THEIS DANIEL J (US)
NELSON BRIAN K (US)
International Classes:
D06H1/00; D06C27/00
Domestic Patent References:
| WO2008088650A1 | 2008-07-24 |
Foreign References:
| US5450116A | 1995-09-12 | |||
| US4945252A | 1990-07-31 | |||
| US5355154A | 1994-10-11 |
Other References:
See also references of EP 2389478A4
Attorney, Agent or Firm:
BAUM, Scott A., et al. (Post Office Box 33427Saint Paul, Minnesota, US)
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