Title:
APPARATUS AND METHOD FOR MANUFACTURING SEMICONDUCTOR SINGLE CRYSTAL
Document Type and Number:
WIPO Patent Application WO/2012/026062
Kind Code:
A1
Abstract:
This apparatus for manufacturing a semiconductor single crystal is provided with, in a growing furnace main body, a crucible, and a heater disposed around the crucible. A heat-retaining cylinder is disposed around the heater in the growing furnace main body, the heat-retaining cylinder has a step on the inner surface, said step partitioning the cylinder into the upper portion and the lower portion, and the inner diameter of the lower portion is larger than that of the upper portion. In the growing furnace main body, a heat insulating plate is disposed on the inner side of the lower portion of the heat-retaining cylinder, said inner side being below the heater, and the outer diameter of the heat insulating plate is larger than the inner diameter of the upper portion of the heat retaining cylinder, and is smaller than the inner diameter of the lower portion of the heat-retaining cylinder. Consequently, the apparatus for manufacturing a semiconductor single crystal is provided, said apparatus having improved heat-retaining effects around the crucible that contains a raw material melt, and sufficiently achieving high growing speed and stabilized qualities of the semiconductor single crystal, even if the amount of heat generated (i.e., power consumed) by the heater disposed on the outside of the crucible is suppressed.
Inventors:
TAKASHIMA SHOU (JP)
MIYAHARA YUUICHI (JP)
IWASAKI ATSUSHI (JP)
MITAMURA NOBUAKI (JP)
SONOKAWA SUSUMU (JP)
MIYAHARA YUUICHI (JP)
IWASAKI ATSUSHI (JP)
MITAMURA NOBUAKI (JP)
SONOKAWA SUSUMU (JP)
Application Number:
PCT/JP2011/003866
Publication Date:
March 01, 2012
Filing Date:
July 06, 2011
Export Citation:
Assignee:
SHINETSU HANDOTAI KK (JP)
TAKASHIMA SHOU (JP)
MIYAHARA YUUICHI (JP)
IWASAKI ATSUSHI (JP)
MITAMURA NOBUAKI (JP)
SONOKAWA SUSUMU (JP)
TAKASHIMA SHOU (JP)
MIYAHARA YUUICHI (JP)
IWASAKI ATSUSHI (JP)
MITAMURA NOBUAKI (JP)
SONOKAWA SUSUMU (JP)
International Classes:
C30B29/06; C30B15/00
Foreign References:
| JPH0446099A | 1992-02-17 | |||
| JP2002068886A | 2002-03-08 | |||
| JP2003212691A | 2003-07-30 | |||
| JP2000053486A | 2000-02-22 | |||
| US6183553B1 | 2001-02-06 |
Attorney, Agent or Firm:
YOSHIMIYA, Mikio (JP)
Good Miya Mikio (JP)
Good Miya Mikio (JP)
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Claims:
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