Title:
AN APPARATUS AND METHOD FOR MEASURING A PROPERTY OF A LAYER IN A MULTILAYERED STRUCTURE
Document Type and Number:
WIPO Patent Application WO2003075321
Kind Code:
A3
Abstract:
An apparatus measures a property of an optically absorbing layer (416) by using a lens (415) to focus a heating beam (403) for a laser (401) on a region of the layer (416), modulating the power from a laser driver circuit (421) to the laser to modulate the heating beam (403) at a predetermined frequency that is selected to be sufficiently low to ensure that at any time the temperature of the layer is approximately equal to a temperature of the layer when heated by an unmodulated beam, and using a detector (420) to measure the power of another beam from another laser (405) that is reflected from the heated region. The measurement can be used to adjust a process parameter that controls a fabrication process.
Inventors:
BORDEN PETER G
LI JIPING
LI JIPING
Application Number:
PCT/US2003/006239
Publication Date:
December 11, 2003
Filing Date:
February 28, 2003
Export Citation:
Assignee:
BOXER CROSS INC (US)
International Classes:
G01N21/00; G01N21/17; G01N21/55; G01N21/59; G01N21/88; G01N27/04; G01R31/26; H01L21/66; H01L; (IPC1-7): G01N21/55
Foreign References:
| US4636088A | 1987-01-13 | |||
| US4513384A | 1985-04-23 |
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