Title:
APPARATUS AND METHOD FOR NANOSCALE AND MICROSCALE MECHANICAL MACHINING AND PROCESSING
Document Type and Number:
WIPO Patent Application WO2003057619
Kind Code:
A8
Abstract:
A microscale device provides for a nanoscale machining. A tool, similar to probes used in atomic force microscopy is attached to a micro-load gear and is powered by a micromotor. This very small tool allows a variety of nanostructures to be fabricated on a variety of substrates.
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Inventors:
MALSHE AJAY P (US)
O'NEAL CHAD (US)
O'NEAL CHAD (US)
Application Number:
PCT/US2003/000096
Publication Date:
May 13, 2004
Filing Date:
January 02, 2003
Export Citation:
Assignee:
UNIV ARKANSAS (US)
MALSHE AJAY P (US)
O'NEAL CHAD (US)
MALSHE AJAY P (US)
O'NEAL CHAD (US)
International Classes:
B23C1/00; B23P13/04; B81B5/00; B81C1/00; (IPC1-7): B81B5/00; B81C1/00
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