Title:
APPARATUS AND METHOD FOR PREVENTING LAMP DAMAGE IN RAPID HEAT TREATMENT EQUIPMENT
Document Type and Number:
WIPO Patent Application WO/2010/064812
Kind Code:
A3
Abstract:
Disclosed are an apparatus and method for preventing damage to the lamp of rapid heat treatment equipment. The most significant feature of the present invention is to provide an apparatus and method for preventing damage to a lamp in rapid heat treatment equipment, wherein the temperature of a quartz case comprising the lamp is sensitized to identify an erratic increase in the temperature so that problems with the lamp may be discovered early to take action. The apparatus and method according to the present invention, allows the possibility of preventing damage or contamination of surrounding components due to lamp explosion; decisions regarding lamp replacement are also facilitated so that productivity can be enhanced. In addition, uniform output of a lamp may be ensured so that product quality is enhanced.
Inventors:
JI SANG HYUN (KR)
JIN DAE-GYOU (KR)
KIM KI NAM (KR)
JIN DAE-GYOU (KR)
KIM KI NAM (KR)
Application Number:
PCT/KR2009/007051
Publication Date:
August 26, 2010
Filing Date:
November 27, 2009
Export Citation:
Assignee:
AP SYSTEMS INC (KR)
JI SANG HYUN (KR)
JIN DAE-GYOU (KR)
KIM KI NAM (KR)
JI SANG HYUN (KR)
JIN DAE-GYOU (KR)
KIM KI NAM (KR)
International Classes:
H05B37/03; H05B1/02
Foreign References:
| JP2005236099A | 2005-09-02 | |||
| KR20050017018A | 2005-02-21 | |||
| JPH0949770A | 1997-02-18 |
Attorney, Agent or Firm:
HUH, Jin-Seok (832-3Yeoksam-dong, Gangnam-gu, Seoul 135-080, KR)
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