Title:
APPARATUS AND METHOD FOR PROCESSING SUBSTRATE
Document Type and Number:
WIPO Patent Application WO/2011/043566
Kind Code:
A2
Abstract:
There is provided a substrate processing apparatus and method capable of preventing the substrate from being heated and efficiently collecting residual deposition material. The substrate processing apparatus includes a chamber unit including an inner space divided into an introduction section, a film formation section, and a discharge section, at least one material injection nozzle unit disposed in the film formation section of the chamber unit to inject a deposition material to a substrate being transferred, and a cooling plate unit disposed to surround the film formation section of the chamber unit and adapted to cool inside of the film formation section. In addition, the substrate processing apparatus further includes at least one cold trap unit disposed at a lower part of the material injection nozzle unit to collect residual deposition material not deposited on the substrate but left from the whole deposition material injected from the material injection nozzle unit.
Inventors:
BAK BYEONG-MIN (KR)
GONG DOO WON (KR)
SON SUNG KWAN (KR)
CHO WHANG SIN (KR)
JUNG SUNG JAE (KR)
PAHK HEUI JAE (KR)
GONG DOO WON (KR)
SON SUNG KWAN (KR)
CHO WHANG SIN (KR)
JUNG SUNG JAE (KR)
PAHK HEUI JAE (KR)
Application Number:
PCT/KR2010/006749
Publication Date:
April 14, 2011
Filing Date:
October 04, 2010
Export Citation:
Assignee:
SNU PRECISION CO LTD (KR)
BAK BYEONG-MIN (KR)
GONG DOO WON (KR)
SON SUNG KWAN (KR)
CHO WHANG SIN (KR)
JUNG SUNG JAE (KR)
PAHK HEUI JAE (KR)
BAK BYEONG-MIN (KR)
GONG DOO WON (KR)
SON SUNG KWAN (KR)
CHO WHANG SIN (KR)
JUNG SUNG JAE (KR)
PAHK HEUI JAE (KR)
International Classes:
H01L21/20; H01L31/042
Foreign References:
| KR20080088354A | 2008-10-02 | |||
| JP2007067455A | 2007-03-15 | |||
| KR20090103164A | 2009-10-01 | |||
| KR20000030256A | 2000-06-05 |
Attorney, Agent or Firm:
NAM, Seung-Hee (1330-9,Seocho-Dong, Seocho-Gu, Seoul 137-858, KR)
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