Title:
APPARATUS AND METHOD OF SECURING A WORKPIECE DURING HIGH-PRESSURE PROCESSING
Document Type and Number:
WIPO Patent Application WO2004096491
Kind Code:
A3
Abstract:
An apparatus for performing high-pressure processing of a workpiece (130) having a top face and a bottom face. The apparatus comprises a processing chamber (101) defined by an upper segment having an upper plate (101A) with top elements (125A-C) and a lower segment with lower plate (101B) and lower elements (120A-C), the upper elements and lower elements defining a workpiece holder (129) for securing the workpiece within the processing chamber (101) so that a substantial portion of the top face and the bottom face is exposed to a processing material introduced into the processing chamber (101).
Inventors:
YOKOMIZO KENJI (US)
Application Number:
PCT/US2004/013132
Publication Date:
July 06, 2006
Filing Date:
April 27, 2004
Export Citation:
Assignee:
SUPERCRITICAL SYSTEMS INC (US)
YOKOMIZO KENJI (US)
YOKOMIZO KENJI (US)
International Classes:
B08B7/00; B08B3/08; B08B3/10; B08B11/02; H01L21/687
Foreign References:
| US6264752B1 | 2001-07-24 | |||
| US6239038B1 | 2001-05-29 | |||
| US20020046707A1 | 2002-04-25 |
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