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Patent Searching and Data


Title:
APPARATUS AND METHODS FOR ELECTROCHEMICAL PROCESSING OF MICROELECTRONIC WORKPIECES
Document Type and Number:
WIPO Patent Application WO2002097165
Kind Code:
A3
Abstract:
An apparatus and method for electrochemical processing of microelectronic workpieces in a reaction vessel (204). The reaction vessel includes: an outer container (220) having an outer wall (222); a fist outlet configured to introduce a primary flow into the outer container and at least one second outlet configured to introduce a secondary flow into the outer container separate from the primary flow; a dielectric field shaping unit (500) in the outer container receiving the secondary flow from the second outlet, the field shaping unit being configured to contain the secondary flow separate from the primary flow, and the field shaping unit having at least one electrode compartment (520) through which the secondary flow can pass; an electrode (600) in the electrode compartment; and an interface member (700) carried by the field shaping unit downstream from the electrode and configured to prevent selected matter of the secondary flow from passing to the primary flow.

Inventors:
HANSON KYLE M (US)
RITZDORF THOMAS L (US)
WILSON GREGORY J (US)
MCHUGH PAUL R (US)
Application Number:
PCT/US2002/017203
Publication Date:
March 06, 2003
Filing Date:
May 30, 2002
Export Citation:
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Assignee:
SEMITOOL INC (US)
HANSON KYLE M (US)
RITZDORF THOMAS L (US)
WILSON GREGORY J (US)
MCHUGH PAUL R (US)
International Classes:
C25D7/12; C10B1/00; C25C7/00; C25D3/00; C25D5/00; C25D17/00; C25D21/00; H01L21/00; (IPC1-7): C25D5/00; C25D17/00
Foreign References:
US5000827A1991-03-19
US5256274A1993-10-26
US6391166B12002-05-21
Other References:
LOWENHEIM F.A.: "Electroplating", 1978, MCGRAW-HILL BOOK COMPANY, NEW YORK, XP002958545
See also references of EP 1397530A4
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