APPARATUS AND METHODS FOR ELECTROCHEMICAL PROCESSING OF MICROELECTRONIC WORKPIECES

WIPO Patent Application WO2002097165

A3

An apparatus and method for electrochemical processing of microelectronic workpieces in a reaction vessel (204). The reaction vessel includes: an outer container (220) having an outer wall (222); a fist outlet configured to introduce a primary flow into the outer container and at least one second outlet configured to introduce a secondary flow into the outer container separate from the primary flow; a dielectric field shaping unit (500) in the outer container receiving the secondary flow from the second outlet, the field shaping unit being configured to contain the secondary flow separate from the primary flow, and the field shaping unit having at least one electrode compartment (520) through which the secondary flow can pass; an electrode (600) in the electrode compartment; and an interface member (700) carried by the field shaping unit downstream from the electrode and configured to prevent selected matter of the secondary flow from passing to the primary flow.

HANSON KYLE M (US)
RITZDORF THOMAS L (US)
WILSON GREGORY J (US)
MCHUGH PAUL R (US)

PCT/US2002/017203

March 06, 2003

May 30, 2002

Click for automatic bibliography generation  

SEMITOOL INC (US)
HANSON KYLE M (US)
RITZDORF THOMAS L (US)
WILSON GREGORY J (US)
MCHUGH PAUL R (US)

C25D7/12; C10B1/00; C25C7/00; C25D3/00; C25D5/00; C25D17/00; C25D21/00; H01L21/00; (IPC1-7): C25D5/00; C25D17/00

US5000827A	1991-03-19
US5256274A	1993-10-26
US6391166B1	2002-05-21

LOWENHEIM F.A.: "Electroplating", 1978, MCGRAW-HILL BOOK COMPANY, NEW YORK, XP002958545
See also references of EP 1397530A4

View/Download PDF      PDF Help

Previous Patent: COMPOSITION AND METHOD FOR TREATING MAGNESIUM ALLOYS

Next Patent: OPERATION OF ALUMINIUM ELECTROWINNING CELLS HAVING METAL-BASED ANODES