Title:
APPARATUS FOR PLASMA SURFACE TREATMENT
Document Type and Number:
WIPO Patent Application WO/2023/043235
Kind Code:
A1
Abstract:
According to one embodiment of the present disclosure, an apparatus for plasma surface treatment is disclosed. The apparatus may comprise: an object to be treated; a seating portion on which at least one of an accommodation container for accommodating the object to be treated and a grasping device for grasping the object to be treated is seated; an isolating portion which forms together with the seating portion an isolation space having at least part of the inside thereof isolated from the outside environment during the operating period of the apparatus and which includes a member having at least one surface that is transparent to light; and a treatment portion which allows plasma surface treatment to be performed on the object to be treated by forming an electric field in the isolation space during the operating period of the apparatus. A representative drawing may be Fig. 6.
Inventors:
LIM YOU BONG (KR)
KIM JUN YOUNG (KR)
KIM JUN YOUNG (KR)
Application Number:
PCT/KR2022/013816
Publication Date:
March 23, 2023
Filing Date:
September 15, 2022
Export Citation:
Assignee:
PLASMAPP CO LTD (KR)
International Classes:
A61C19/00; A61C8/00; A61C19/02; A61L2/14; B65D81/18; B65D85/52; H01F7/00; H05H1/00; H05H1/46; H05H7/00
Foreign References:
| US20180138022A1 | 2018-05-17 | |||
| JP2006040743A | 2006-02-09 | |||
| KR20120005104A | 2012-01-16 | |||
| KR20040108751A | 2004-12-24 | |||
| KR20100048521A | 2010-05-11 | |||
| KR102036169B1 | 2019-10-24 |
Attorney, Agent or Firm:
LEE, Dae Ho et al. (KR)
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