Title:
APPARATUS AND PROCESS FOR BAKING TREATMENT OF GLASS SUBSTRATE
Document Type and Number:
WIPO Patent Application WO/2014/005362
Kind Code:
A1
Abstract:
Disclosed is an apparatus for baking treatment of a glass substrate, the apparatus comprising: a baking chamber, a support member, a temperature sensing device, a heating device, a cooling device, and a temperature control device. Further disclosed is a process for baking treatment of a glass substrate. The present invention can dynamically control the temperature of the support member in contact with the glass substrate such that the temperature of the glass substrate remains consistent with the temperature of the support member throughout the course of baking, thus avoiding formation of spots on the glass substrate.
Inventors:
MA TAO (CN)
DING TAO (CN)
LIU MING (CN)
SONG TAO (CN)
ZHAO GUODONG (CN)
LIU YIJUN (CN)
DING TAO (CN)
LIU MING (CN)
SONG TAO (CN)
ZHAO GUODONG (CN)
LIU YIJUN (CN)
Application Number:
PCT/CN2012/079573
Publication Date:
January 09, 2014
Filing Date:
August 02, 2012
Export Citation:
Assignee:
SHENZHEN CHINA STAR OPTOELECTRONICS TECHNOLOGYCO LTD (CN)
MA TAO (CN)
DING TAO (CN)
LIU MING (CN)
SONG TAO (CN)
ZHAO GUODONG (CN)
LIU YIJUN (CN)
MA TAO (CN)
DING TAO (CN)
LIU MING (CN)
SONG TAO (CN)
ZHAO GUODONG (CN)
LIU YIJUN (CN)
International Classes:
H01L21/67; G03F7/38
Foreign References:
| CN1973356A | 2007-05-30 | |||
| CN101231941A | 2008-07-30 | |||
| KR20040020419A | 2004-03-09 | |||
| CN1745332A | 2006-03-08 |
Attorney, Agent or Firm:
ESSEN PATENT&TRADEMARK AGENCY (CN)
深圳翼盛智成知识产权事务所(普通合伙) (CN)
深圳翼盛智成知识产权事务所(普通合伙) (CN)
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