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Patent Searching and Data


Title:
APPARATUS FOR PRODUCING ELECTRONIC DEVICE, METHOD FOR CONTROLLING SAME, ELECTRONIC DEVICE AND METHOD FOR PRODUCING ELECTRONIC DEVICE
Document Type and Number:
WIPO Patent Application WO/2018/047704
Kind Code:
A1
Abstract:
[Problem] To provide a production apparatus which separates/bonds a high-quality, highly efficient or low-cost epitaxial thin film. [Solution] A production apparatus which is provided with: a separation device 10 that comprises, for example, a substrate holding body 12 which holds a growth substrate 13 for obtaining a thin film 14 that is an epitaxial film, a substrate supporting body 11 which supports the substrate holding body, a thin film holding body 16 which holds the thin film separated from the growth substrate, a thin film supporting body 15 which supports the thin film holding body, a first chamber 200 which is composed of the substrate supporting body and the thin film holding body, a second chamber 210 which is composed of the substrate holding body and the substrate supporting body, and a third chamber 220 which is composed of the thin film holding body and the thin film supporting body; and a pressure device 50 that applies first, second and third air pressures to the first, second and third chambers, respectively.

Inventors:
OTSUKA KANJI (JP)
HASHIMOTO KAORU (JP)
SEIMIYA YOSHIHIRO (JP)
Application Number:
PCT/JP2017/031324
Publication Date:
March 15, 2018
Filing Date:
August 31, 2017
Export Citation:
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Assignee:
MIRAI CORP (JP)
International Classes:
H01L21/02; H01L21/20
Foreign References:
JP2013179237A2013-09-09
JP2003249631A2003-09-05
Attorney, Agent or Firm:
AQUA PATENTS, DESIGNS AND TRADEMARKS (JP)
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