Title:
APPARATUS FOR PRODUCING TREATED WATER
Document Type and Number:
WIPO Patent Application WO/2018/179495
Kind Code:
A1
Abstract:
An apparatus for producing treated water by adding a pH-adjusting agent and/or an ORP-adjusting agent to ultrapure water, provided with: a chemical solution tank 1 for storing a chemical solution comprising a pH-adjusting agent and/or an ORP-adjusting agent; a chemical injection piping 3 for chemical injection of the chemical solution in the chemical solution tank 1 into the ultrapure water; and a deaeration means 6 for deaerating the chemical solution injected into the ultrapure water. When producing treated water, which is useful as rinsing water, etc. for semiconductor wafers, by adding a pH-adjusting agent and/or an ORP-adjusting agent to ultrapure water, the present invention solves the problem of DO being introduced from the chemical solution and the problem of faulty chemical injection and faulty flow meter measurement due to foaming of the chemical solution, making it possible to produce treated water of low DO concentration and high water quality in a stable manner.
Inventors:
MASAOKA TOORU (JP)
Application Number:
PCT/JP2017/032800
Publication Date:
October 04, 2018
Filing Date:
September 12, 2017
Export Citation:
Assignee:
KURITA WATER IND LTD (JP)
International Classes:
B01D19/00; C02F1/68; C02F1/20; H01L21/304
Foreign References:
| JP2003334433A | 2003-11-25 | |||
| JPH1177023A | 1999-03-23 | |||
| JP2000084368A | 2000-03-28 | |||
| JP2000317211A | 2000-11-21 | |||
| JPS5858189A | 1983-04-06 | |||
| JP2007268397A | 2007-10-18 |
Attorney, Agent or Firm:
SHIGENO, Tsuyoshi et al. (JP)
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