Title:
APPARATUS FOR SIMULTANEOUSLY TRANSFERRING MICRO-DEVICES TO TARGET OBJECT
Document Type and Number:
WIPO Patent Application WO/2020/004716
Kind Code:
A1
Abstract:
Disclosed is an apparatus for simultaneously transferring micro-devices to a target object. The apparatus may comprise: multiple red (R), green (G), and blue (B) micro-devices attached to a carrier sheet by an adhesive material; a target substrate to which the micro-devices are transferred; an alignment unit for aligning the multiple micro-devices with the substrate; and a laser beam unit disposed above the carrier sheet so as to emit a beam having a specific wavelength in the direction passing through the carrier sheet, wherein the micro-devices each comprise: a growth substrate; a first semiconductor layer and a second semiconductor layer disposed on the growth substrate; a first pad disposed on the first semiconductor layer; a second pad disposed on the second semiconductor layer; and an adhesive material disposed on the first pad and the second pad, and when the micro-devices and the substrate are aligned in transfer positions by the alignment unit, the laser beam unit applies energy to the adhesive material so as to allow the micro-devices to be transferred to the substrate. Accordingly, the efficiency of transfer can be improved.
Inventors:
AN JOONG IN (KR)
AHN DO HWAN (KR)
AHN DO HWAN (KR)
Application Number:
PCT/KR2018/011843
Publication Date:
January 02, 2020
Filing Date:
October 08, 2018
Export Citation:
Assignee:
LEDAZ CO LTD (KR)
International Classes:
H01L21/67; H01L21/52; H01L21/68
Foreign References:
| JP2003218402A | 2003-07-31 | |||
| KR100853410B1 | 2008-08-21 | |||
| KR20180035430A | 2018-04-06 | |||
| JP2010251360A | 2010-11-04 | |||
| JP2008118161A | 2008-05-22 |
Attorney, Agent or Firm:
NAM & NAM WORLD PATENT & LAW FIRM (KR)
Download PDF: