Title:
APPARATUS FOR SPECTRUM AND INTENSITY PROFILE CHARACTERIZATION OF A BEAM, USE THEREOF AND METHOD THEREOF
Document Type and Number:
WIPO Patent Application WO/2018/072766
Kind Code:
A1
Abstract:
The present invention concerns an apparatus for spectral and intensity profile characterization comprising: a diffractive element; a beam block (3) attached to the diffractive element, the beam block (3) being positioned so as to block the passage of the direct incoming beam (1) which is not incident on the diffractive element; a device for translation of the beam block (3) and the diffractive element; reflective element (4); fixed detector (5) positioned on the axis of the incoming beam (1). The invention also concerns use and a method thereof. Such a compact system provides application in the field of spectrometry and diagnostics of the beam intensity profile, especially in the area of XUV and soft X-rays.
Inventors:
NEJDL JAROSLAV (CZ)
Application Number:
PCT/CZ2017/050050
Publication Date:
April 26, 2018
Filing Date:
October 21, 2017
Export Citation:
Assignee:
FYZIKALNI USTAV AV CR V V I (CZ)
International Classes:
G01J1/42; G01J3/02; G01J3/18; G01N23/20
Foreign References:
| EP1288652A2 | 2003-03-05 | |||
| EP1396716A2 | 2004-03-10 | |||
| US20120154902A1 | 2012-06-21 | |||
| US20120154902A1 | 2012-06-21 | |||
| US20130107899A1 | 2013-05-02 | |||
| US20130170508A1 | 2013-07-04 | |||
| US20140374605A1 | 2014-12-25 | |||
| EP3076208A1 | 2016-10-05 |
Other References:
FRANK SCHOLZE ET AL: "New PTB beamlines for high-accuracy EUV reflectometry at BESSY II", PROCEEDINGS OPTICAL DIAGNOSTICS OF LIVING CELLS II, vol. 4146, 8 November 2000 (2000-11-08), US, pages 72 - 82, XP055444021, ISSN: 0277-786X, ISBN: 978-1-5106-1324-9, DOI: 10.1117/12.406678
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