Title:
APPARATUS FOR SUPPLYING LIQUID CHEMICAL
Document Type and Number:
WIPO Patent Application WO/2019/027084
Kind Code:
A1
Abstract:
Disclosed is an apparatus for supplying a liquid chemical. The apparatus for supplying a liquid chemical has an inner space in which the liquid chemical is accommodated, and comprises: a pump body including a liquid chemical inlet part which is arranged at a first position inside the inner space and into which the liquid chemical is introduced, and a liquid chemical dispensing part which is arranged at a second position inside the inner space for dispensing the liquid chemical; a rotating screw of which one portion is inserted into the inside of the pump body, and having one end that is rotatably connected to a first surface on the first position in the pump body and another end that is connected to a second surface on the pump body opposite the first surface; a driving motor, which is installed on the second surface and connected to the rotating screw, for causing rotation of the rotating screw; a piston having a plate shape, which is coupled onto the rotating screw, and which shifts from the first position to the second position according to the direction of rotation of the rotating screw, when the rotating screw is rotated; a first bellows tube, which is accommodated in the inner space of the pump body, and of which one end is fixed to the first surface and the other end is fixed to one surface on the piston opposite the first surface; and a second bellows tube, which is accommodated in the inner space of the pump body, and of which one end is fixed to the second surface and the other end is fixed to one surface on the piston opposite the second surface.
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Inventors:
CHO JUNG KEUN (KR)
Application Number:
PCT/KR2017/009456
Publication Date:
February 07, 2019
Filing Date:
August 29, 2017
Export Citation:
Assignee:
POTON CO LTD (KR)
International Classes:
H01L21/67
Foreign References:
| JP2004140099A | 2004-05-13 | |||
| JP2013100803A | 2013-05-23 | |||
| US6071094A | 2000-06-06 | |||
| KR20030048515A | 2003-06-25 | |||
| KR20080048913A | 2008-06-03 |
Attorney, Agent or Firm:
PARK, Youn-Ho (KR)
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