Title:
APPEARANCE INSPECTION APPARATUS AND APPEARANCE INSPECTION METHOD
Document Type and Number:
WIPO Patent Application WO/2020/262593
Kind Code:
A1
Abstract:
An appearance inspection apparatus performs appearance inspection using image data obtained by capturing an image of an inspection subject M. The appearance inspection apparatus comprises: two light-emitting units for emitting light toward the inspection subject; and an imaging unit for capturing an image of an inspection region of the inspection subject, which is a region irradiated with the light emitted by the two light-emitting units. The two light-emitting units are located in positions that at least partially overlap each other in an optical axis direction of the imaging unit when viewed in a direction perpendicular to the optical axis direction and that are different in distance from the optical axis of the imaging unit when viewed in the optical axis direction.
Inventors:
SHIBATA KEIJI (JP)
Application Number:
PCT/JP2020/025163
Publication Date:
December 30, 2020
Filing Date:
June 26, 2020
Export Citation:
Assignee:
NIDEC CORP (JP)
International Classes:
G01N21/84; G01N21/88
Domestic Patent References:
| WO2005119227A1 | 2005-12-15 | |||
| WO2018088552A1 | 2018-05-17 |
Foreign References:
| JP2014009970A | 2014-01-20 | |||
| JP2019035609A | 2019-03-07 | |||
| JP2017198612A | 2017-11-02 | |||
| JP2015232484A | 2015-12-24 | |||
| JP2016118518A | 2016-06-30 |
Download PDF: