Title:
APPEARANCE INSPECTION DEVICE, ILLUMINATION DEVICE, AND APPEARANCE INSPECTION METHOD
Document Type and Number:
WIPO Patent Application WO/2022/091312
Kind Code:
A1
Abstract:
Provided are an appearance inspection device, illumination device, and appearance inspection method that are capable of reducing illuminance unevenness while enhancing the accuracy or inspection speed of appearance inspection, and the like. An illumination device (40) of an appearance inspection device (10) comprises diffusion optical elements (420) that are disposed between the light emission units (402) of a plurality of lamps (400) and a workpiece (W) and diffuse light (1000) emitted from the light emission units such that the light widens more in a lamp alignment direction (D2) than in a direction perpendicular to the lamp alignment direction (D2).
Inventors:
OYAMA TAKATOSHI (JP)
SAKAI MOTOHIRO (JP)
KAGAYA MASAHITO (JP)
KOBAYASHI EIJI (JP)
SAKAI MOTOHIRO (JP)
KAGAYA MASAHITO (JP)
KOBAYASHI EIJI (JP)
Application Number:
PCT/JP2020/040709
Publication Date:
May 05, 2022
Filing Date:
October 29, 2020
Export Citation:
Assignee:
KAHOKU LIGHTING SOLUTIONS CORP (JP)
International Classes:
G01N21/84
Foreign References:
| JPS62147587A | 1987-07-01 | |||
| JPH07104131A | 1995-04-21 | |||
| JPS6134124U | 1986-03-01 | |||
| JP2003130802A | 2003-05-08 | |||
| JP2016014632A | 2016-01-28 | |||
| US20170123218A1 | 2017-05-04 |
Attorney, Agent or Firm:
MATSUBARA, MURAKI & ASSOCIATES, P.C. (JP)
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