AQUEOUS DISPERSION FOR CHEMICAL MECHANICAL POLISHING, CHEMICAL MECHANICAL POLISHING METHOD USING SAME, AND KIT FOR PREPARING AQUEOUS DISPERSION FOR CHEMICAL MECHANICAL POLISHING

Title:

AQUEOUS DISPERSION FOR CHEMICAL MECHANICAL POLISHING, CHEMICAL MECHANICAL POLISHING METHOD USING SAME, AND KIT FOR PREPARING AQUEOUS DISPERSION FOR CHEMICAL MECHANICAL POLISHING

Document Type and Number:

WIPO Patent Application WO/2011/093195

Kind Code:

A1

Abstract:

Disclosed is an aqueous dispersion for chemical mechanical polishing, which is characterized by containing abrasive grains, ferrate ions (FeO4 2-) and a dispersion medium.

Inventors:

KAWAMOTO, Tatsuyoshi (9-2 Higashi-shinbashi 1-chome, Minato-k, Tokyo 40, 〒1058640, JP)
河本　達慶 (〒40 東京都港区東新橋一丁目９番２号　ＪＳＲ株式会社内 Tokyo, 〒1058640, JP)
ABE, Taichi (9-2 Higashi-shinbashi 1-chome, Minato-k, Tokyo 40, 〒1058640, JP)
阿部　太一 (〒40 東京都港区東新橋一丁目９番２号　ＪＳＲ株式会社内 Tokyo, 〒1058640, JP)

Application Number:

JP2011/050917

Publication Date:

August 04, 2011

Filing Date:

January 20, 2011

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Assignee:

JSR CORPORATION (9-2 Higashi-shinbashi 1-chome, Minato-ku Tokyo, 40, 〒1058640, JP)
ＪＳＲ株式会社 (〒40 東京都港区東新橋一丁目９番２号 Tokyo, 〒1058640, JP)
KAWAMOTO, Tatsuyoshi (9-2 Higashi-shinbashi 1-chome, Minato-k, Tokyo 40, 〒1058640, JP)
河本　達慶 (〒40 東京都港区東新橋一丁目９番２号　ＪＳＲ株式会社内 Tokyo, 〒1058640, JP)
ABE, Taichi (9-2 Higashi-shinbashi 1-chome, Minato-k, Tokyo 40, 〒1058640, JP)

International Classes:

H01L21/304; B24B37/00; C09K3/14

Attorney, Agent or Firm:

OFUCHI, Michie et al. (2nd Floor, Ogikubo TM Bldg. 26-13, Ogikubo 5-chome, Suginami-k, Tokyo 51, 〒1670051, JP)

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