Title:
AQUEOUS PROCESSING LIQUID
Document Type and Number:
WIPO Patent Application WO/2014/003157
Kind Code:
A1
Abstract:
An aqueous processing liquid to be used when cutting a fragile material with a wire saw incorporates a water-soluble polymer, and is characterized in that the mass average molecular weight of the water-soluble polymer is 3×103 to 6×105, inclusive, and the viscosity of the aqueous processing liquid at 25°C is 1.5mPa·s to 15Pa·s, inclusive.
Inventors:
KITAMURA TOMOHIKO (JP)
Application Number:
PCT/JP2013/067772
Publication Date:
January 03, 2014
Filing Date:
June 28, 2013
Export Citation:
Assignee:
IDEMITSU KOSAN CO (JP)
KITAMURA TOMOHIKO (JP)
KITAMURA TOMOHIKO (JP)
International Classes:
C10M171/00; B24B27/06; B28D5/04; B28D7/02; C10M107/34; C10M173/02; H01L21/304; C10N20/02; C10N20/04; C10N30/00; C10N40/22
Domestic Patent References:
| WO2010113678A1 | 2010-10-07 | |||
| WO2012017947A1 | 2012-02-09 | |||
| WO2011007590A1 | 2011-01-20 | |||
| WO2012115099A1 | 2012-08-30 | |||
| WO2012132448A1 | 2012-10-04 |
Foreign References:
| JP2003082334A | 2003-03-19 | |||
| JP2011256377A | 2011-12-22 | |||
| JP2011161613A | 2011-08-25 | |||
| JP2012126812A | 2012-07-05 | |||
| JPH0857848A | 1996-03-05 | |||
| JP2003082334A | 2003-03-19 | |||
| JP2011021096A | 2011-02-03 |
Other References:
See also references of EP 2868741A4
Attorney, Agent or Firm:
KINOSHITA & ASSOCIATES (JP)
Bottom intellectual property office of patent business corporation Tatsuyuki (JP)
Bottom intellectual property office of patent business corporation Tatsuyuki (JP)
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