Title:
ARC DISCHARGE DEVICE AND ARC DISCHARGE METHOD USING MICROWAVE PLASMA
Document Type and Number:
WIPO Patent Application WO/2021/066354
Kind Code:
A1
Abstract:
The present invention relates to an arc discharge device and an arc discharge method using microwave plasma, which can generate an arc at a low voltage by applying a DC bias to microwave plasma generated by microwave power and having high-density electrons, and can minimize microwave electrode wear due to the arc. According to the present invention, the electrons generated in the microwave plasma remarkably reduce a voltage required for DC discharge in the process of electron generation such as impact ionization or secondary electron emission necessary for discharge. Therefore, it is possible to minimize microwave electrode wear, and increase the applicability of arc discharge technology to the biomedical field, such as bio material, plastic, and soft material, for example, rubber, in which the arc discharge technology has been limitedly applied.
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Inventors:
YUN GUN SU (KR)
NAM WOO JIN (KR)
LEE JI MO (KR)
JEONG SEOK YONG (KR)
LEE JAE KOO (KR)
NAM WOO JIN (KR)
LEE JI MO (KR)
JEONG SEOK YONG (KR)
LEE JAE KOO (KR)
Application Number:
PCT/KR2020/012486
Publication Date:
April 08, 2021
Filing Date:
September 16, 2020
Export Citation:
Assignee:
POSTECH RES & BUSINESS DEV FOUND (KR)
International Classes:
H05H1/34
Foreign References:
| KR20190065854A | 2019-06-12 | |||
| KR100333800B1 | 2002-11-27 | |||
| KR101012345B1 | 2011-02-09 | |||
| KR20100069263A | 2010-06-24 | |||
| US20170243727A1 | 2017-08-24 |
Attorney, Agent or Firm:
LEE, Cheol Hee (KR)
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