Title:
ARC EVAPORATION DEVICE
Document Type and Number:
WIPO Patent Application WO2004051695
Kind Code:
A3
Abstract:
The invention relates to an arc evaporation device comprising a target, which serves as a cathode and which is enclosed by a housing that forms the anode. The aim of the invention is to achieve a uniform evaporation of the target material. To achieve this, several electrically conductive second connections (84, 86) originate from the housing, said connections being linked by a second conductor (74), the latter fixing an envelope, whose geometry corresponds to the envelope of the target or that of a first conductor (72), which links the electric connections (76, 78) of the target. First and second conductors (72, 74) are connected to the poles (80, 88) of a voltage source (82).
Inventors:
CURTINS HERMANN (CH)
Application Number:
PCT/EP2003/013556
Publication Date:
November 11, 2004
Filing Date:
December 02, 2003
Export Citation:
Assignee:
PVT PLASMA UND VAKUUMTECHNIK G (DE)
CURTINS HERMANN (CH)
CURTINS HERMANN (CH)
International Classes:
C23C14/32; H01J37/32; (IPC1-7): H01J37/32; C23C14/32
Domestic Patent References:
| WO2002099943A2 | 2002-12-12 |
Foreign References:
| US5203980A | 1993-04-20 | |||
| US5895559A | 1999-04-20 |
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