Title:
ARC EVAPORATION SOURCE HAVING FAST FILM-FORMING SPEED, FILM FORMATION DEVICE AND MANUFACTURING METHOD FOR COATING FILM USING THE ARC EVAPORATION SOURCE
Document Type and Number:
WIPO Patent Application WO/2011/161903
Kind Code:
A1
Abstract:
Disclosed is an arc evaporation source having fast film-forming speed. The disclosed arc evaporation source (1) is provided with: at least one circumference magnet (3) which surrounds the circumference of a target (2), and which is arranged so that the magnetisation direction of the magnet runs along the direction orthogonal to the surface of the target (2); a non-ring shaped first permanent magnet (4A) which is arranged on the rear surface side of the target (2), has polarity in the same direction as the polarity of the circumference magnet (3), and is arranged so that the magnetisation direction thereof runs along the direction orthogonal to the surface of the target (2); a non-ring shaped second permanent magnet (4B) which is arranged either on the rear surface side of the first permanent magnet (4A) or between the first permanent magnet (4A) and the target (2), so as to leave a gap from the first permanent magnet (4A), and which has polarity in the same direction as the polarity of the circumference magnet (3), and is arranged so that the magnetisation direction thereof runs along the direction orthogonal to the surface of the target (2); and a magnetic body (5) which is arranged between the first permanent magnet (4A) and the second permanent magnet (4B).
Inventors:
TANIFUJI SHINICHI
YAMAMOTO KENJI
NOMURA HOMARE
KUROKAWA YOSHINORI
GOTO NAOYUKI
YAMAMOTO KENJI
NOMURA HOMARE
KUROKAWA YOSHINORI
GOTO NAOYUKI
Application Number:
PCT/JP2011/003403
Publication Date:
December 29, 2011
Filing Date:
June 15, 2011
Export Citation:
Assignee:
KOBE STEEL LTD (JP)
TANIFUJI SHINICHI
YAMAMOTO KENJI
NOMURA HOMARE
KUROKAWA YOSHINORI
GOTO NAOYUKI
TANIFUJI SHINICHI
YAMAMOTO KENJI
NOMURA HOMARE
KUROKAWA YOSHINORI
GOTO NAOYUKI
International Classes:
C23C14/35; C23C14/24
Foreign References:
| JP2009144236A | 2009-07-02 | |||
| JPS63446U | 1988-01-05 | |||
| JPS62207863A | 1987-09-12 | |||
| JP2006249527A | 2006-09-21 |
Other References:
See also references of EP 2586888A4
Attorney, Agent or Firm:
KOTANI, Etsuji et al. (JP)
Etsuji Kotani (JP)
Etsuji Kotani (JP)
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Claims: