Title:
ARC VAPORIZATION SOURCE
Document Type and Number:
WIPO Patent Application WO/2018/097263
Kind Code:
A1
Abstract:
Provided is an arc vaporization source capable of increasing reaching efficiency, at which charged particles emitted from a target reach a subject. An arc vaporization source 1A that supplies charged particles toward a predetermined base material S is provided with a target T, and a magnetic field generating mechanism 2 including an electromagnetic coil 20. The electromagnetic coil 20 is disposed between the target T and the base material S, and has a cylindrical shape having a reference straight line CL as the axis center. When the magnitude of a magnetic field at the intersection between the reference straight line CL and a target emission surface TF of the target T is represented by B0 (Gauss), and the maximum value of the magnetic field between the target emission surface TF and the base material S, said magnetic field being on the reference straight line CL, is represented by Bm (Gauss), the relationship expressed by formula Bm/B0≤3 is satisfied.
Inventors:
YAMAMOTO KENJI
MIZUNO MASAO
NARAI AKIRA
HARADA NOBUHIRO
SASAKI TORU
TAKAHASHI KAZUMASA
KIKUCHI TAKASHI
MAKI TAKUMI
SASAKI KEITA
MIZUNO MASAO
NARAI AKIRA
HARADA NOBUHIRO
SASAKI TORU
TAKAHASHI KAZUMASA
KIKUCHI TAKASHI
MAKI TAKUMI
SASAKI KEITA
Application Number:
PCT/JP2017/042287
Publication Date:
May 31, 2018
Filing Date:
November 24, 2017
Export Citation:
Assignee:
KOBE STEEL LTD (JP)
NATIONAL UNIV CORPORATION NAGAOKA UNIV OF TECHNOLOGY (JP)
NATIONAL UNIV CORPORATION NAGAOKA UNIV OF TECHNOLOGY (JP)
International Classes:
C23C14/24; C23C14/32; H01J27/14; H01J37/08; H05H1/48
Foreign References:
| JPH02194167A | 1990-07-31 | |||
| JPH04236770A | 1992-08-25 | |||
| JP2015054995A | 2015-03-23 |
Attorney, Agent or Firm:
KOTANI, Etsuji et al. (JP)
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