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Title:
AREA-VARIABLE CAPACITOR STRUCTURE, COMB GRID CAPACITOR ACCELEROMETER AND COMB GRID CAPACITOR GYROSCOPE
Document Type and Number:
WIPO Patent Application WO/2011/130941
Kind Code:
A1
Abstract:
An area-variable capacitor structure for a micro-mechanical sensor, and a micro-mechanical comb grid capacitive accelerometer and a micro-mechanical comb grid capacitive gyroscope, which employ the capacitor structure are disclosed. Each capacitor unit of the capacitor structure includes a movable electrode (1) and a fixed electrode (2), wherein the positive surface of the movable electrode (1) and the positive surface of the fixed electrode (2) are in parallel. The positive surface of the movable electrode (1) is rectangle and the positive surface of the fixed electrode (2) is triangle or sawtooth, or the positive surface of the movable electrode (1) is triangle or sawtooth and the positive surface of the fixed electrode (2) is rectangle. The triangular positive surface is only overlapped with a long side of the rectangular positive surface. Compared to the prior art, the micro-mechanical sensor which introduces the capacitor structure may carry out adjustment of the elastic coellicient.

Inventors:
JIN, Zhonghe (Room 428, Floor 4 Xindian Building,No. 38, Zheda Road, Xihu Distric, Hangzhou Zhejiang 7, 310027, CN)
金仲和 (中国浙江省杭州市西湖区浙大路38号信电楼4楼428室, Zhejiang 7, 310027, CN)
HU, Shichang (Room 515, Floor 5 Xindian Building,No. 38, Zheda Road, Xihu Distric, Hangzhou Zhejiang 7, 310027, CN)
胡世昌 (中国浙江省杭州市西湖区浙大路38号信电楼5楼515室, Zhejiang 7, 310027, CN)
Application Number:
CN2010/074340
Publication Date:
October 27, 2011
Filing Date:
June 23, 2010
Export Citation:
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Assignee:
ZHEJIANG UNIVERSITY (No. 38, Zheda Road Xihu Distric, Hangzhou Zhejiang 7, 310027, CN)
浙江大学 (中国浙江省杭州市西湖区浙大路38号, Zhejiang 7, 310027, CN)
JIN, Zhonghe (Room 428, Floor 4 Xindian Building,No. 38, Zheda Road, Xihu Distric, Hangzhou Zhejiang 7, 310027, CN)
金仲和 (中国浙江省杭州市西湖区浙大路38号信电楼4楼428室, Zhejiang 7, 310027, CN)
HU, Shichang (Room 515, Floor 5 Xindian Building,No. 38, Zheda Road, Xihu Distric, Hangzhou Zhejiang 7, 310027, CN)
International Classes:
G01P15/125
Domestic Patent References:
WO2009120193A1
Foreign References:
CN1748148A
US5488864A
Attorney, Agent or Firm:
HANGZHOU TIANQIN INTELLECTUAL PROPERTY AGENCY CO., LTD (Room 501, Zhu-Pin-Jin-ZuoNo. 1 Jing-Zhou Road,Xihu District, Hangzhou, Zhejiang 3, 310013, CN)
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Claims: