Title:
ARMATURE COIL FOR ELECTROMAGNETIC ACTUATOR, ELECTROMAGNETIC ACTUATOR, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD
Document Type and Number:
WIPO Patent Application WO/2015/034005
Kind Code:
A1
Abstract:
Disclosed is an armature coil (60) that constitutes a stator of an x-axis linear motor and that generates a magnetic field by passing a current therethrough, the armature coil comprising: a band-shaped electroconductive layer (62a) that is made of copper and that is wound around a predetermined winding axis; a band-shaped insulating layer (62b) that is provided between opposing surfaces of the electroconductive layer (62a), and that electrically insulates the opposing electroconductive layers (62a) from one another; and a bonding layer (62c) that bonds together the opposing surfaces of the electroconductive layer (62a) with the insulating layer (62b) therebetween.
Inventors:
ITO AKIHIRO (JP)
KOUKETSU MASAYUKI (JP)
MORIMOTO SHIGERU (JP)
YOSHIMOTO HIROMITSU (JP)
TANAKA KOJI (JP)
KOUKETSU MASAYUKI (JP)
MORIMOTO SHIGERU (JP)
YOSHIMOTO HIROMITSU (JP)
TANAKA KOJI (JP)
Application Number:
PCT/JP2014/073340
Publication Date:
March 12, 2015
Filing Date:
September 04, 2014
Export Citation:
Assignee:
CKD CORP (JP)
NIKON CORP (JP)
NIKON CORP (JP)
International Classes:
H02K41/02; H01F7/06; H02K41/03
Domestic Patent References:
| WO2001035168A1 | 2001-05-17 |
Foreign References:
| JP2011004592A | 2011-01-06 | |||
| US6891600B2 | 2005-05-10 | |||
| US20030025890A1 | 2003-02-06 | |||
| US8059260B2 | 2011-11-15 | |||
| US20080094592A1 | 2008-04-24 | |||
| US20130164687A1 | 2013-06-27 | |||
| US20100066992A1 | 2010-03-18 | |||
| US7023610B2 | 2006-04-04 | |||
| US6778257B2 | 2004-08-17 | |||
| US8004650B2 | 2011-08-23 | |||
| US6611316B2 | 2003-08-26 |
Other References:
See also references of EP 3043361A4
Attorney, Agent or Firm:
TATEISHI, Atsuji (JP)
Tokuji Tateishi (JP)
Tokuji Tateishi (JP)
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