Title:
ARRANGEMENT APPARATUS AND ARRANGEMENT METHOD FOR FORMING NANO PARTICLES IN SHAPE OF PILLAR
Document Type and Number:
WIPO Patent Application WO/2011/065793
Kind Code:
A2
Abstract:
The present invention relates to an arrangement apparatus and an arrangement method for arranging a plurality of nano particles in a shape of a pillar by simultaneously inserting the nano particles in each nano groove of a substrate having a nano groove array. The arrangement apparatus for the nano particles in the present invention comprises: a nano particle transport plate including an upper substrate to which the nano particles are attached; a nano particle reception plate including a lower substrate which faces the upper substrate and in which the nano particles separated from the upper substrate are positioned; a plurality of nano grooves which are formed on the lower substrate to induce the arrangement of the nano particles in a predetermined position; and a sensor for measuring an interval between the upper substrate and the lower substrate and positions of the nano particles and the nano grooves.
Inventors:
YOON KYUNG BYUNG (KR)
SON PHIL KOOK (KR)
SON PHIL KOOK (KR)
Application Number:
PCT/KR2010/008493
Publication Date:
June 03, 2011
Filing Date:
November 29, 2010
Export Citation:
Assignee:
UNIV SOGANG IND UNIV COOP FOUN (KR)
YOON KYUNG BYUNG (KR)
SON PHIL KOOK (KR)
YOON KYUNG BYUNG (KR)
SON PHIL KOOK (KR)
International Classes:
B82B3/00
Foreign References:
| JP2007165586A | 2007-06-28 | |||
| KR20040101777A | 2004-12-03 | |||
| JP2004209971A | 2004-07-29 | |||
| KR20060024564A | 2006-03-17 |
Other References:
None
See also references of EP 2508470A4
See also references of EP 2508470A4
Attorney, Agent or Firm:
ASTRAN INT'L IP GROUP (KR)
특허법인 천문 (KR)
특허법인 천문 (KR)
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