Title:
ARRAY SUBSTRATE, AND MANUFACTURING METHOD THEREFOR AND DISPLAY DEVICE THEREOF
Document Type and Number:
WIPO Patent Application WO/2018/045822
Kind Code:
A1
Abstract:
Disclosed are an array substrate, a manufacturing method therefor and a display device thereof, relating to the technical field of displays. The manufacturing method for the array substrate comprises: forming a first active layer, the material of the first active layer being polysilicon; performing ion implantation at least on a region to be doped of the first active layer so as to form a doped region, the doped region being used to electrically connect with a corresponding source electrode and a corresponding drain electrode; forming a second active layer, the material of the second active layer being amorphous metal oxides; after performing ion implantation at least on the region to be doped of the first active layer and after forming the second active layer, using an activation process to activate ions implanted into the first active layer and to convert the material of the second active layer from an amorphous state to a microcrystalline state.
Inventors:
PENG KUANJUN (CN)
LIAO FENG (CN)
LIAO FENG (CN)
Application Number:
PCT/CN2017/092781
Publication Date:
March 15, 2018
Filing Date:
July 13, 2017
Export Citation:
Assignee:
BOE TECHNOLOGY GROUP CO LTD (CN)
International Classes:
H01L21/77; H01L21/265
Foreign References:
| CN104867921A | 2015-08-26 | |||
| US20050074930A1 | 2005-04-07 | |||
| US20080230770A1 | 2008-09-25 | |||
| CN106298648A | 2017-01-04 |
Attorney, Agent or Firm:
CHINA SCIENCE PATENT & TRADEMARK AGENT LTD. (CN)
Download PDF: