Title:
ARRAY SUBSTRATE AND MANUFACTURING METHOD THEREFOR, AND DISPLAY PANEL
Document Type and Number:
WIPO Patent Application WO/2020/000629
Kind Code:
A1
Abstract:
Provided in the present application are an array substrate and a manufacturing method therefor, and a display panel. The present application forms a gate electrode and a source/drain electrode with different thicknesses on an electroplated base layer by means of a metal plating process, and forms a dielectric layer on the substrate covering the gate electrode and exposing the source/drain electrode by utilizing the height difference between the gate electrode and the source/drain electrode, such that an active layer is electrically connected to the source/drain electrode and isolated from the gate electrode by means of the dielectric layer, thus not requiring an etching stop layer, simplifying the IGZO process and saving costs.
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Inventors:
XIA HUI (CN)
TAN ZHIWEI (CN)
TAN ZHIWEI (CN)
Application Number:
PCT/CN2018/103269
Publication Date:
January 02, 2020
Filing Date:
August 30, 2018
Export Citation:
Assignee:
SHENZHEN CHINA STAR OPTOELECTRONICS SEMICONDUCTOR DISPLAY TECH CO LTD (CN)
International Classes:
H01L27/12; G02F1/1368; H01L27/32
Foreign References:
| CN104617042A | 2015-05-13 | |||
| CN104035253A | 2014-09-10 | |||
| CN102263060A | 2011-11-30 | |||
| KR20150034044A | 2015-04-02 |
Attorney, Agent or Firm:
ESSEN PATENT & TRADEMARK AGENCY (CN)
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