Title:
ARRAY SUBSTRATE AND MANUFACTURING METHOD THEREFOR, AND DISPLAY PANEL
Document Type and Number:
WIPO Patent Application WO/2020/113771
Kind Code:
A1
Abstract:
An array substrate and a manufacturing method therefor, and a display panel. The array substrate (10) comprises a flexible substrate (11); an active layer (12) covering the flexible substrate (11); a first gate insulation layer (13) covering the active layer (12); a first gate layer (14) arranged on the first gate insulation layer (13), the first gate layer (14) being a multi-layer composite metal layer; a second gate insulation layer (15) covering the first gate insulation layer (13) and the first gate layer (14); and a second gate layer (16) arranged on the second gate insulation layer (15), the second gate layer (16) being a multi-layer composite metal layer. The first gate layer (14) and the second gate layer (16) use multi-layer composite metal layers to replace molybdenum to serve as gate wires, thereby effectively improving the bending resistance of the gate wires in the display panel, and P-type heavy doping and activation processes are carried out prior to the deposition of the first gate layer (14), thereby effectively preventing an increase in the impedance of the first gate layer (14) after same is subjected to a high activation temperature.
Inventors:
YU YUN (CN)
YANG WEIWEI (CN)
YANG WEIWEI (CN)
Application Number:
PCT/CN2019/071346
Publication Date:
June 11, 2020
Filing Date:
January 11, 2019
Export Citation:
Assignee:
WUHAN CHINA STAR OPTOELECTRONICS SEMICONDUCTOR DISPLAY TECH CO LTD (CN)
International Classes:
H01L27/12; H01L21/77; H01L27/32
Foreign References:
| CN106098628A | 2016-11-09 | |||
| CN105140238A | 2015-12-09 | |||
| CN101226964A | 2008-07-23 | |||
| CN107910302A | 2018-04-13 | |||
| US8222646B2 | 2012-07-17 |
Attorney, Agent or Firm:
ESSEN PATENT&TRADEMARK AGENCY (CN)
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