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Title:
ARRAY SUBSTRATE AND MANUFACTURING METHOD FOR ARRAY SUBSTRATE
Document Type and Number:
WIPO Patent Application WO/2019/161617
Kind Code:
A1
Abstract:
An array substrate (100) and a manufacturing method for the array substrate (100). Said method comprising: forming a first source/drain electrode layer (20) between a substrate (10) and a semiconductor layer (30), and enabling, by means of heat treatment, a material of the first source/drain electrode layer (20) to be diffused into the semiconductor layer (30), such that a position of the semiconductor layer (30) corresponding to the first source/drain electrode layer (20) is conductive, and the obtained semiconductor layer (30) comprising a semiconductor region (31), and a conductive first conductor region (32) and a conductive second conductor region (33) on both sides of the semiconductor region (31). Moreover, the material of the first source/drain electrode layer (20) is diffused into the semiconductor layer (30) by means of heat treatment, and the oxygen content in the semiconductor layer (30) is redistributed in this process, thereby obtaining the conductive first conductor region (32) and the conductive second conductor region (33). The conductive first conductor region (32) and the second conductor region (33) have good thermal stability, without being affected by the subsequent heat treatment process, thereby ensuring the transmission of carriers, and ensuring the electrical performance of the thin film transistor.

Inventors:
ZHANG, Jianmin (No.9-2, Tangming Rd Guangming New Distric, Shenzhen Guangdong 2, 518132, CN)
Application Number:
CN2018/083920
Publication Date:
August 29, 2019
Filing Date:
April 20, 2018
Export Citation:
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Assignee:
SHENZHEN CHINA STAR OPTOELECTRONICS SEMICONDUCTOR DISPLAY TECHNOLOGY CO., LTD (No.9-2, Tangming Rd Gongming Street, Guangming New Distric, Shenzhen Guangdong 2, 518132, CN)
International Classes:
H01L27/12; H01L21/28; H01L21/324; H01L21/84; H01L29/417
Attorney, Agent or Firm:
SCIHEAD IP LAW FIRM (Room 1508, Huihua Commercial & Trade BuildingNo. 80, XianLie Zhong Road, Yuexiu Distric, Guangzhou Guangdong 0, 510070, CN)
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