Title:
ARRAY SUBSTRATE OF OLED DISPLAY DEVICE AND MANUFACTURING METHOD THEREOF
Document Type and Number:
WIPO Patent Application WO/2018/120309
Kind Code:
A1
Abstract:
Provided is a manufacturing method of an array substrate of an OLED display device, comprising: forming, by means of a first mask, active regions (101, 102) of a first thin film transistor T1 and a second thin film transistor T2; forming, by means of a second mask, channel doping regions (103, 104), source doping regions (105, 107), and drain doping regions (106, 108) of the T1 and T2; forming, by means of a third mask, gates (110, 111) of the T1 and T2; forming, by means of a fourth mask, vias (113, 114); and forming, by means of a fifth mask, source-drains (115, 116, 118) of the T1 and T2, a data line and a pixel electrode. The manufacturing method can reduce process steps.
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Inventors:
JIANG CHUNSHENG (CN)
Application Number:
PCT/CN2017/071162
Publication Date:
July 05, 2018
Filing Date:
January 13, 2017
Export Citation:
Assignee:
SHENZHEN CHINA STAR OPTOELECT (CN)
International Classes:
H01L21/77; H01L27/12
Foreign References:
| CN103489827A | 2014-01-01 | |||
| CN106057825A | 2016-10-26 | |||
| CN203445123U | 2014-02-19 | |||
| CN102655118A | 2012-09-05 | |||
| US20110186847A1 | 2011-08-04 | |||
| US20050253171A1 | 2005-11-17 |
Attorney, Agent or Firm:
ESSEN PATENT&TRADEMARK AGENCY (CN)
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