Title:
ARRAY SUBSTRATE PREPARATION METHOD, DISPLAY PANEL, AND DISPLAY DEVICE
Document Type and Number:
WIPO Patent Application WO/2018/033011
Kind Code:
A1
Abstract:
An array substrate preparation method, a display panel, and a display device. The preparation method comprises: sequentially forming a semiconductor layer (204), a gate insulation layer (205), a gate (206) and an intermediate dielectric layer (207) on a base substrate (201); forming a via hole (208) in the intermediate dielectric layer (207) to expose the part of the semiconductor layer (204); carrying out plasma bombardment on the part of the semiconductor layer (204) exposed in the via hole (208); and on the intermediate dielectric layer (207), forming a source/drain (209) that is connected to the semiconductor layer (204) through the via hole (208).
Inventors:
CHEN JIANGBO (CN)
DU JIANHUA (CN)
WANG GUOYING (CN)
LIU WEI (CN)
DU JIANHUA (CN)
WANG GUOYING (CN)
LIU WEI (CN)
Application Number:
PCT/CN2017/096775
Publication Date:
February 22, 2018
Filing Date:
August 10, 2017
Export Citation:
Assignee:
BOE TECHNOLOGY GROUP CO LTD (CN)
International Classes:
H01L21/77; H01L27/12; H01L27/32
Foreign References:
| CN106206612A | 2016-12-07 | |||
| CN101609843A | 2009-12-23 | |||
| CN102651317A | 2012-08-29 |
Attorney, Agent or Firm:
CHINA PATENT AGENT (H.K.) LTD. (CN)
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