ASSISTANCE SYSTEM FOR SPECIFIC TEST, AND ASSISTANCE METHOD AND PROGRAM FOR SPECIFIC TEST

Title:

ASSISTANCE SYSTEM FOR SPECIFIC TEST, AND ASSISTANCE METHOD AND PROGRAM FOR SPECIFIC TEST

Document Type and Number:

WIPO Patent Application WO/2019/065607

Kind Code:

A1

Abstract:

The purpose of the present invention is to increase accuracy of a specific test using an electronic microscope and improve work efficiency. Provided is a system that identifies test recipe information corresponding to an object to be tested on the basis of attribute information about a testing sample, and analyzes and evaluates the object to be tested contained in the testing sample by checking image data and element analysis data that are acquired by a measuring device in accordance with a control program for the test recipe information, against reference image data and reference element analysis data that are used as evaluation references for the object to be tested.

Inventors:

TADA NOBUYOSHI (JP)
TANAKA SHIGEYA (JP)
NOGUCHI MINORI (JP)
OOMINAMI YUUSUKE (JP)
GOTO MAYA (JP)

Application Number:

PCT/JP2018/035393

Publication Date:

April 04, 2019

Filing Date:

September 25, 2018

Export Citation:

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Assignee:

HITACHI HIGH TECH CORP (JP)

International Classes:

G01N23/2252; G06N99/00

Domestic Patent References:

WO2015037157A1

2015-03-19

Foreign References:

JP2003107022A	2003-04-09
JP2006074065A	2006-03-16
JP2010025836A	2010-02-04
JP2003166954A	2003-06-13
JP2005233658A	2005-09-02
JP2014182123A	2014-09-29
JP2006506816A	2006-02-23
JP2002181828A	2002-06-26
JP2005317848A	2005-11-10
JP2003149248A	2003-05-21
US20080125648A1	2008-05-29
US20170194126A1	2017-07-06
JP2012156410A	2012-08-16

Other References: