Title:
ATMOSPHERIC PRESSURE PLASMA GENERATOR, AND WORKPIECE PAIR PROCESSING MACHINE
Document Type and Number:
WIPO Patent Application WO/2015/132853
Kind Code:
A1
Abstract:
The atmospheric pressure plasma generator is characterized by the inclusion of a frame (12), a first compartment (16) provided inside the frame (12), a gas heater for flowing a heated first processing gas into the first compartment (16), a second compartment (14) provided inside the frame (12) to be adjacent to the first compartment (16), a gas cooler for flowing a cooled second processing gas into the second compartment (14), a plasma generation electrode (24) provided inside the second compartment (14), a plasma generator for turning into plasma the first processing gas present inside the first compartment (16) with the plasma generation electrode (24), and an ejection port (20) for ejecting the plasma gas turned into plasma by the plasma generator.
Inventors:
IKEDO TOSHIYUKI (JP)
JINDO TAKAHIRO (JP)
JINDO TAKAHIRO (JP)
Application Number:
PCT/JP2014/055276
Publication Date:
September 11, 2015
Filing Date:
March 03, 2014
Export Citation:
Assignee:
FUJI MACHINE MFG (JP)
International Classes:
H05H1/24; H05H1/28
Foreign References:
| JP2012178348A | 2012-09-13 | |||
| JP2013152913A | 2013-08-08 | |||
| JP2010061938A | 2010-03-18 | |||
| JPS6316574U | 1988-02-03 | |||
| JPS54142150A | 1979-11-06 |
Other References:
See also references of EP 3116289A4
Attorney, Agent or Firm:
KATAOKA, Tomoki (JP)
Yuki Kataoka (JP)
Yuki Kataoka (JP)
Download PDF:
Previous Patent: ADHESIVE TAPE FOR SEMICONDUCTOR PROCESSING
Next Patent: MULTIFUNCTION ELECTROMAGNETIC RETARDER
Next Patent: MULTIFUNCTION ELECTROMAGNETIC RETARDER