Title:
ATOMIC FORCE MICROSCOPE
Document Type and Number:
WIPO Patent Application WO/2011/126232
Kind Code:
A2
Abstract:
The present invention relates to an atomic force microscope (AFM) capable of randomly scanning a substrate having a large surface area at a high speed. The microscope comprises: a substrate stage unit for supporting and horizontally transferring a substrate; a scan head unit for probing and scanning the top of the substrate facing the substrate stage unit using a cantilever; a frame for supporting the scan head unit; a movable stage unit for attaching and detaching the scan head unit to and from the frame, and moving the scan head unit perpendicularly with respect to the substrate when replacing the probe tip and the cantilever in the scan head unit; and a finely movable stage unit for connecting the movable stage unit and the scan head unit, contacting the probe tip with the surface of the substrate when the scan head unit performs scanning, and separating the probe tip from the surface of the substrate when the substrate is moved horizontally by the substrate stage unit.
Inventors:
HONG, Jae Wan (108-301, Sangdo The Sharp Apt. 521 Sangdo-dong, Dongjak-gu, Seoul 156-030, 156-030, KR)
홍재완 (서울 동작구 상도동 52 상도더샾 APT 108-301, 156-030 Seoul, 156-030, KR)
홍재완 (서울 동작구 상도동 52 상도더샾 APT 108-301, 156-030 Seoul, 156-030, KR)
Application Number:
KR2011/002185
Publication Date:
October 13, 2011
Filing Date:
March 30, 2011
Export Citation:
Assignee:
NANOFOCUS INC. (Room 701, Ace Techno Tower 1197-17, Guro 3-dong, Guro-gu, Seoul 152-766, 152-766, KR)
(주)나노포커스 (서울 구로구 구로3동 197-17 에이스테크노1차 701호, 152-766 Seoul, 152-766, KR)
HONG, Jae Wan (108-301, Sangdo The Sharp Apt. 521 Sangdo-dong, Dongjak-gu, Seoul 156-030, 156-030, KR)
(주)나노포커스 (서울 구로구 구로3동 197-17 에이스테크노1차 701호, 152-766 Seoul, 152-766, KR)
HONG, Jae Wan (108-301, Sangdo The Sharp Apt. 521 Sangdo-dong, Dongjak-gu, Seoul 156-030, 156-030, KR)
International Classes:
G01Q60/24; G01B21/20; H01L21/66
Attorney, Agent or Firm:
KWON, Hyuk-Soo et al. (3rd Fl, 827-25 Yeoksam-don, Kangnam-ku Seoul 135-080, 135-080, KR)
Claims: