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Patent Searching and Data


Title:
ATOMIC LAYER DEPOSITION POWDER COATING
Document Type and Number:
WIPO Patent Application WO/2010/046373
Kind Code:
A3
Abstract:
A system and method are described for providing simultaneously conformal coating of a plurality of three dimensional objects using atomic layer deposition. The system comprises a dielectric tube adapted for maintaining the plurality of objects under vacuum and at least one inlet for providing a gaseous material in the dielectric tube. The dielectric tube used for comprising the objects is mounted rotatable so as to be able to rotate the plurality of objects under vacuum during atomic layer deposition of a coating on the plurality of objects.

Inventors:
DETAVERNIER, Christophe (Kemelweg 24, Denderleeuw, B-9473, BE)
HAEMERS, Johan (James Ensorlaan 6, Sint-Denijs-Westrem, B-9051, BE)
DEDUYTSCHE, Davy (Bommelstraat 53, Gent, B-9000, BE)
Application Number:
EP2009/063758
Publication Date:
February 03, 2011
Filing Date:
October 20, 2009
Export Citation:
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Assignee:
UNIVERSITEIT GENT (Sint-Pietersnieuwstraat 25, Gent, B-9000, BE)
DETAVERNIER, Christophe (Kemelweg 24, Denderleeuw, B-9473, BE)
HAEMERS, Johan (James Ensorlaan 6, Sint-Denijs-Westrem, B-9051, BE)
DEDUYTSCHE, Davy (Bommelstraat 53, Gent, B-9000, BE)
International Classes:
C23C16/458; B01J3/03; B01J8/00; C23C16/44; C23C16/455
Foreign References:
US6913827B22005-07-05
US6060129A2000-05-09
US6251337B12001-06-26
US3944053A1976-03-16
Other References:
MCCORMICK J ET AL: "Rotary reactor for atomic layer deposition on large quantities of nanoparticles", JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY: PART A, AVS /AIP, MELVILLE, NY., US, vol. 25, no. 1, 2 January 2007 (2007-01-02), pages 67 - 74, XP012102560, ISSN: 0734-2101, DOI: DOI:10.1116/1.2393299
Attorney, Agent or Firm:
WAUTERS, Davy et al. (DenK iP bvba, Pastoor Ceulemansstraat 3, Schiplaken, B-3191, BE)
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