Title:
ATTENUATOR DEVICE AND LASER PROCESSING APPARATUS
Document Type and Number:
WIPO Patent Application WO/2022/018917
Kind Code:
A1
Abstract:
This attenuator device comprises: a first window pair that has a pair of first windows including a pair of first surfaces extending so as to form a Brewster angle with a light axis; a rotation holding part that holds the first window pair rotatably about the light axis; a second window pair that has a pair of second windows including a pair of second surfaces extending so as to form a Brewster angle with the light axis; and a λ/4 phase element that, when the wavelength of laser light is represented by λ, gives a phase difference of λ/4 between a polarization component parallel to an optical axis and a polarization component orthogonal to the optical axis. The second window pair is disposed such that the vibration direction of a p polarization component passing through the second window pair is inclined at 45 degrees with respect to the optical axis of the λ/4 phase element when viewed from a direction parallel to the light axis.
Inventors:
ITO HARUYASU (JP)
Application Number:
PCT/JP2021/015881
Publication Date:
January 27, 2022
Filing Date:
April 19, 2021
Export Citation:
Assignee:
HAMAMATSU PHOTONICS KK (JP)
International Classes:
G02B26/02; B23K26/00; G02B27/28
Foreign References:
| CN103984112A | 2014-08-13 | |||
| JPS4916000Y1 | 1974-04-22 | |||
| JPH11258526A | 1999-09-24 | |||
| JPS59228207A | 1984-12-21 | |||
| JP2007225905A | 2007-09-06 | |||
| US3655268A | 1972-04-11 |
Other References:
See also references of EP 4113190A4
Attorney, Agent or Firm:
HASEGAWA Yoshiki et al. (JP)
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