Title:
AUTO-FILLING THREE-ARM-TYPE THERMAL SCANNING PROBE FOR USE IN MICRO-NANO MANUFACTURING
Document Type and Number:
WIPO Patent Application WO/2022/007615
Kind Code:
A1
Abstract:
An auto-filling three-arm-type thermal scanning probe for use in micro-nano manufacturing. The probe consists of a three-arm-type cantilever (16), metal contact solder pads (22), nickel-chromium alloy heating electrodes for printing (23), nickel-chromium alloy heating electrodes for conveying (24), and a polymer storage area (27), is manufactured by employing a conventional micro-nano processing process such as lithography and wet etching. A gradient density design of the nickel-chromium alloy heating electrodes for conveying (24) is utilized to generate a continuous temperature gradient transition, thereby implementing the continuous conveyance of a printed material from the polymer storage area (27) to a tip area, thus implementing auto-filling, which can be seamlessly integrated with a CMOS process, the printed material can be completely removed by acetone or an oxygen plasma that are commonly used in the CMOS process without producing stains. Moreover, a micro-nano processing method requires only an atomic force microscope that costs much less than an electron-beam lithography machine or an extreme ultraviolet lithography machine, prints in room temperature, and has the characteristics of being inexpensive and easy to use.
Inventors:
HU HUAN (CN)
MAO RENWEI (CN)
MAO RENWEI (CN)
Application Number:
PCT/CN2021/100920
Publication Date:
January 13, 2022
Filing Date:
June 18, 2021
Export Citation:
Assignee:
UNIV ZHEJIANG (CN)
International Classes:
G01Q70/18; B81C99/00; B82Y40/00; G01Q70/10; G01Q70/14
Foreign References:
| CN111812357A | 2020-10-23 | |||
| US5929438A | 1999-07-27 | |||
| US20170003602A1 | 2017-01-05 | |||
| US20120164564A1 | 2012-06-28 | |||
| CN110656358A | 2020-01-07 | |||
| CN105793776A | 2016-07-20 |
Other References:
HUAN HU: "NANO-ELECTRO-MECHANICAL SYSTEMS FABRICATED BY TIP-BASED NANOFABRICATION", UNIVERSITY OF ILLINOIS AT URBANA-CHAMPAIGN-DISSERTATION, 16 September 2014 (2014-09-16), XP055886637, Retrieved from the Internet [retrieved on 20220202]
Attorney, Agent or Firm:
BEIJING FINELAND IP FIRM (CN)
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