Title:
AUTO-FOCUSING SYSTEM AND METHOD BASED ON LINE SCANNING, AND APPLICATION THEREOF
Document Type and Number:
WIPO Patent Application WO/2024/051198
Kind Code:
A1
Abstract:
Disclosed in the present invention is an auto-focusing system based on line scanning. The auto-focusing system comprises a light source module, a light-splitting module, a microscope objective lens and a line scanning inspection module, the light source module comprising a light source, a lens and an auto-focusing sensor, wherein light in a first waveband that is generated by the light source is guided to the light-splitting module and is transmitted into the microscope objective lens; light in the first waveband that is emitted from the microscope objective lens is transmitted by the light-splitting module and then enters the auto-focusing sensor; light in a second waveband that is emitted from the microscope objective lens is reflected by the light-splitting module and is then guided to the line scanning inspection module; and line scanning measurement is performed after the position of the lens is adjusted to calibrate a focal plane of the microscope objective lens to be confocal with a focal plane of the line scanning inspection module, and auto-focusing of the line scanning inspection module is realized by means of adjusting the relative positions of the auto-focusing system as a whole and an object to be measured. The present invention can solve the problem of the existing AOI having a narrow field of view and having a high requirement for the flatness of the surface of an object to be inspected, thus making it difficult to meet the requirements of an online scanning system to collect a clear image.
Inventors:
CHEN ZONGPU (CN)
FU JUNJIE (CN)
FU JUNJIE (CN)
Application Number:
PCT/CN2023/093430
Publication Date:
March 14, 2024
Filing Date:
May 11, 2023
Export Citation:
Assignee:
SUZHOU JINGLAI OPTO CO LTD (CN)
WUHAN JINGLI ELECTRONIC TECH CO LTD (CN)
WUHAN JINGCE ELECTRONIC GROUP CO LTD (CN)
WUHAN JINGLI ELECTRONIC TECH CO LTD (CN)
WUHAN JINGCE ELECTRONIC GROUP CO LTD (CN)
International Classes:
H04N1/031; G02B21/24
Domestic Patent References:
| WO2010067256A1 | 2010-06-17 | |||
| WO2021184169A1 | 2021-09-23 |
Foreign References:
| CN115150519A | 2022-10-04 | |||
| CN112415735A | 2021-02-26 | |||
| CN114047203A | 2022-02-15 | |||
| US20030142398A1 | 2003-07-31 |
Other References:
LING-YU TANG, MING-FENG GE, WEN-FEI DONG: "Design and research of fully automatic push-broom hyperspectral microscopic imaging system", CHINESE OPTICS, vol. 14, no. 6, 1 January 2021 (2021-01-01), pages 1486 - 1494, XP093147169, ISSN: 2095-1531, DOI: 10.37188/CO.2021-0040
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