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Patent Searching and Data


Title:
AUTOCLAVE DEVICE THAT DRIVES PLATE USING AIR, AND DRIVING METHOD USING SAID DEVICE
Document Type and Number:
WIPO Patent Application WO/2014/061900
Kind Code:
A1
Abstract:
The present invention relates to an autoclave device that drives a plate using air, and to a driving method using said device and, more particularly, to an autoclave device that drives a plate using air and to a driving method using said device in which air is allowed to flow into an air groove of a packing which is inserted into the plate so as to press against a substrate when the plate on which the substrate to be pressed is accommodated is driven. Herein, the packing is inserted into an insertion groove which is formed at the upper side and outer circumference of the plate on which the substrate is accommodated, the air groove is formed due to the lower portion of the packing being open, and the plate is lowered when the air flows into the air groove so that the plate is driven using the air which is capable of pressing the substrate accommodated on the plate. Accordingly, no driving unit is required to raise and lower the plate when the plate on which the substrate to be pressed is accommodated is brought into close contact, and thus the structure and configuration thereof can be simplified, and the durability of the plate can be maintained over a long period of time so that the lifespan of the autoclave device can be lengthened.

Inventors:
RYU SUNG-WOOK (KR)
Application Number:
PCT/KR2013/006236
Publication Date:
April 24, 2014
Filing Date:
July 12, 2013
Export Citation:
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Assignee:
FOSYS CO LTD (KR)
International Classes:
B01J3/04; B01J19/24
Foreign References:
KR101032248B12011-05-02
KR20070121884A2007-12-28
KR20120002909A2012-01-09
KR100782119B12007-12-05
Attorney, Agent or Firm:
LEE, CHUN-HEE (KR)
이춘희 (KR)
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