Title:
AUTOMATED ATTACHING AND DETACHING OF AN INTERCHANGEABLE PROBE HEAD
Document Type and Number:
WIPO Patent Application WO/2014/186289
Kind Code:
A3
Abstract:
A probe card apparatus can comprise a tester interface to a test controller, probes for contacting terminals of electronic devices to be tested, and electrical connections there between. The probe card apparatus can comprise a primary sub-assembly, which can include the tester interface. The probe card apparatus can also comprise an interchangeable probe head, which can include the probes. The interchangeable probe head can be attached to and detached from the primary subassembly while the primary sub-assembly is secured to or in a housing of a test system. Different probe heads each having probes disposed in different patterns to test different types of electronic devices can thus be interchanged while the primary sub-assembly is secured to or in a housing of the test system.
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Inventors:
KASAI TOSHIHIRO (US)
WATANABE MASANORI (US)
YOICHI URAKAWA (US)
WATANABE MASANORI (US)
YOICHI URAKAWA (US)
Application Number:
PCT/US2014/037701
Publication Date:
March 19, 2015
Filing Date:
May 12, 2014
Export Citation:
Assignee:
FORMFACTOR (US)
International Classes:
H01L21/66; G01R1/073
Foreign References:
| JP2012119363A | 2012-06-21 | |||
| JP2000150596A | 2000-05-30 | |||
| US20060186906A1 | 2006-08-24 | |||
| US20040113643A1 | 2004-06-17 | |||
| JP2009016745A | 2009-01-22 |
Attorney, Agent or Firm:
BURRASTON, N. Kenneth (60 E. South TempleSuite 180, Salt Lake City Utah, US)
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